DWDM100G参数
Technical Parameters | Unit | Specifications |
CentralWavelength | nm | ITU Grid |
Passband Bandwidth | nm | >=0.42 |
PeakInsertionLoss | dB | <=0.25 |
PassbandInsertionLoss | dB | <=0.5 |
Passband Ripple | dB | <=0.25 |
Stopband Bandwidth | nm | <=1.18 |
ReflectionIsolation@ Passband | dB | >=13.5 |
Stopband Bandwidth Isolation | dB | >=30 |
ThermalWavelength Drift | pm/℃ | <1 |
IncidentAngle(AOI) | degree | 1.8 |
Polarization DependentLoss(PDL) | dB | <=0.05 |
Polarization ModeDispersion(PMD) | PS | <=0.1 |
ArReflectance | % | <=0.2 |
Substrate Material | Customer Specified | |
Dimensions | mm | 1.4*1.4*1.0 (or Customer Specified) |
Scratch/dig | 40/20 | |
WedgeAngle Between TwoSurface | degree | Customer Specified |
Operation Temperature | ℃ | −20~70 |
Storage Temperature | ℃ | −40~85 |
技术参数
真空室尺寸 | 965.4mmx1117.6mmx685.8mm |
极限真空 | 低于4E-5Pa |
漏气速率 | ≤5E-9Pa·m3/s（氦检漏率）/保压12小时≤5Pa |
恢复真空 | 100分钟之内达到3E-4Pa（不加热） |
基板旋转机构 | 中心驱动，旋转速度调整范围：0-1000rpm |
基板盘尺寸 | 150mm或304mm（二选一） |
光控系统 | GILITEK透射式光学控制系统（激光和白光可选，任意膜厚监控） |
阴极靶 | ①8寸靶*2+6寸靶*1+RF射频源 ②8寸靶4双靶共溅射(二选一) |