Principle and components analysis of vacuum coating machine for vacuum coating machine

The production of the vacuum conditions for the application of vacuum equipment most widely, generally with the vacuum chamber, a vacuum unit, electrical control cabinet three parts composition and exhaust system with diffusion pump and a mechanical pump and roots pump and low temperature cold trap +polycold "vacuum coating equipment. The company specializes in the development and production of vacuum coating equipment has experienced technical team and high-quality after-sales service team for you to solve the problems encountered in the use of equipment. Below, a detailed introduction of the various parts of the vacuum coating machine and its working principle.

First, vacuum body -- vacuum cavity according to the product processing requirements are different, the size of the vacuum chamber is not the same, the current application most have diameter 1.3m, 0.9m, 1.5m, 1.8m, and cavity made of stainless steel material production, requires no rust, solid and various parts of the vacuum chamber is connected with the valve, which is used to connect the suction pump.

Auxiliary exhaust system, exhaust system is an important part of the vacuum system for coating machine, mainly by mechanical pump, booster pump (mainly introduce the roots pump and oil diffusion pump is composed of three parts. The exhaust system with diffusion pump + mechanical pump and roots pump + cryotraps +polycold ". Exhaust process: mechanical pump the vacuum chamber pumped to less than low vacuum state about 2.0*10-2PA, diffusion pump subsequent vacuum provides premise, after the diffusion pump vacuum, mechanical pump and fit oil diffusion pump which are connected in series, in such a way complete pumping action.

Mechanical pump: also called pre stage pump, mechanical pump is the most widely used a low vacuum pump, it is oil to keep the sealing effect and rely on mechanical methods are constantly changing the pump suction cavity volume, was pumping gas in the container volume constant expansion to obtain vacuum.

Classification of mechanical pump: pump mechanical has a lot of, commonly used a slide valve type (this is mainly used in large-scale equipment), reciprocating piston, stator and rotary vane (this is currently the most widely used. This paper mainly introduces) four types.

2 mechanical pump is from the beginning of the work, and its main parameters are the ultimate vacuum, pumping rate, this is an important basis for the design and selection of mechanical pump. A single pump can pump the container from the atmosphere to the ultimate vacuum of 1.0*10-1PA, a dual stage mechanical pump can pump the container from the atmosphere to 6.7*10-2 PA, or even higher. Pumping rate, is refers to the rotary vane pump according to the rated speed operation, the unit time can exhaust gas volume, can be calculated by the formula: Sth=2nVs=2nfsL FS said suction cavity cross-sectional area, l said cavity length and coefficient of said rotor rotates one week two exhaust process, vs said when the rotor in a horizontal position, suction end. At this time the cavity volume maximum speed n. Mechanical pump exhaust effect and the rotational speed of the motor and the belt tightness relationship, when the motor belt is loose, when the motor speed is very slow, the mechanical pump exhaust effect will become worse, so to regular maintenance, inspection, mechanical pump oil sealing effect, we also need to constantly check, oil is too small, amounting to less than the sealing effect, pump will leak. Too much oil, the suction holes to plug, to suction and exhaust, in general, under the oil level online 0.5 cm.

3 the mechanical pump is often used to dry air is removed, but not pumping in addition to containing high oxygen content, explosive and corrosive gas, mechanical pump is generally used to pumping gas permanent, but to moisture without good effect, so it can't pumping moisture removal. Rotary vane pump stator, rotor, shrapnel and other components. The main function of the rotor in the stator but with different stator mandrel, like two inscribed circle, the rotor slot is provided with two pieces of shrapnel, bombs and pieces, in the middle is provided with a spring, to ensure the shrapnel tightly attached to the inner wall of the stator.